Ductile deformation and subsurface damage evolution mechanism .
WEBNov 1, 2023 · The multiple nanoscratch test exhibits the same type of subsurface deformation as grinding, including amorphous layer, disloions, stacking faults, lattice distortions, nanocrystalline and highpressure phase transition. The similarity of material removal mechanisms between wafer selfrotation grinding and multiple nanoscratch is .